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MEMSnet Home: MEMS-Talk: how to dice the silicon wafer?
how to dice the silicon wafer?
2006-08-12
Song Wuzhou
2006-08-15
chengzhengxi
how to dice the silicon wafer?
chengzhengxi
2006-08-15
laser dicer

chengzhengxi
2006-08-15


·¢¼þÈË£º Song Wuzhou
·¢ËÍʱ¼ä£º 2006-08-12 12:31:14
ÊÕ¼þÈË£º [email protected]
³­ËÍ£º
Ö÷Ì⣺ [mems-talk] how to dice the silicon wafer?

Dear. all
   I have some trouble with dicing the silicon wafer after release. The
release is done using back hole open. Could you give me some suggestion?
Thanks!

Regards
Wuzhou
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