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MEMSnet Home: MEMS-Talk: Developing S8 channels through reservoir ports
silicon nitridation poser
2006-07-24
K Saw
2006-07-24
Glenn Silveira
2006-08-05
VS Bhat
2006-07-24
Isaac Chan
2006-08-09
K Saw
2006-08-10
VS Bhat
sample holders
2006-08-12
li cai
2006-08-14
jeff besterman
Developing S8 channels through reservoir ports
2006-08-15
prabhu arumugam
2006-08-15
Joseph Grogan
Developing S8 channels through reservoir ports
Joseph Grogan
2006-08-15
At what point in the SU8 processing are you bonding the whole thing
together and how are you doing the bonding?

-Joe Grogan

prabhu arumugam wrote:
> Dear SU 8 experts,
>
> I am trying to develop a 20 micron high SU8 channel
> (1.2 cm long) bonded between glass and silicon through
> the fluidic ports at either end of the channel. I am
> not able to develop the channel fully. I exposed for
> 20 s and developed in an ultrasonic bath.  Could
> anyone share their experience/tricks/tips in solving
> this.
>
reply
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