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MEMSnet Home: MEMS-Talk: Adhesives wafer bonding
Adhesives wafer bonding
2006-08-16
Cheng-Yu Hsieh
2006-08-16
Nicolas Duarte
2006-08-17
LSujatha
2006-08-19
David Henriks
2006-08-17
Lung-hao Hu
Adhesives wafer bonding
David Henriks
2006-08-19
Dear Cheng-yu:

A very common adhesive to use for such an application is our MWH135
Mounting Wax. This is a low melting point wax and is acetone soluble. It
is commonly used for temporary bonding applications when cutting,
polishing or otherwise processing materials. Please contact me off-line
for more information.

Best regards-

David

Cheng-Yu Hsieh wrote:

>Hi Everybody,
>I am trying to bond one 4 inch silicon wafer to a 8 inch silicon wafer.
>I need a temporary bonding adhesive which I should be able to remove
>after I have done chemical mechanical planarization process on the 4 inch
wafer.
>
>Does anybody know of commercially available adhesives
>that I can use for this? I need an adhesive which is
>very  simple in it's application and ideally would
>like something which I can just apply in-between the
>two wafers and then stick them together and later
>should be able to de-bond them easily too.
>
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