On 8/21/06, [email protected] wrote:
>
> Its amazing the amount of replies I got to the 10 nanometer
> hole question.
> And I didn't mind the humor. But the lack of knowledge in this area
> surprised me.
>
> John Bishop
> President
> Norsam Technologies, Inc.
The problem is that your question is poorly asked.
10 nm deep or 10 nm diameter?
What is your film made of?
What is the substrate the film is on?
Is the shape of the hole critical? If so, what shape does it need to be?
How much damage can the film take?
Do you need the hole lined up with previously existing patterns?
10 nanometers is small - very small, and is beyond the limits of most
technologies for patterning. Asking a question without any details means
that no one will know the answer.
Looking up that your company, Norsam technologies, runs FIB machines, I
would think that you would be an expert in making nanoscale holes already.
Are you testing the listserve to see if we know anything?
--
Robert Knobel
Assistant Professor, Dept. of Physics, Queen's University
Kingston, Ontario, Canada K7L 3N6
Phone:613-533-2672, Fax:613-533-6463
http://www.physics.queensu.ca/~knobel