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MEMSnet Home: MEMS-Talk: Etching TiAlN
Etching TiAlN
2006-08-22
Vikram
Dicing sapphire
2006-08-22
Shay Kaplan
2006-08-22
adnan merhaba
Etching TiAlN
Vikram
2006-08-22
Hi Friends,

 Could anyone tell me how to etch TiAlN layer over a silicon-di-oxide layer? I
am working on gate electrodes for MOSFET. Any other ideas to use other matals
for the same are wlecome.

Regards
Vikram
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