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MEMSnet Home: MEMS-Talk: Dicing sapphire
Etching TiAlN
2006-08-22
Vikram
Dicing sapphire
2006-08-22
Shay Kaplan
2006-08-22
adnan merhaba
Dicing sapphire
Shay Kaplan
2006-08-22
Hi everyone,
I'm trying to cut sapphire wafers, ~300u thick, and I experience a very high
blade ware - microns per cm cut.
I'm using resin blades with ~45u size diamond and progressive cutting.
Anyone has any experience with sapphire dicing? What blades, spindle speed
and table speed should one use?

Thanks
Shay

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