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MEMSnet Home: MEMS-Talk: COC wafer thinning
how to make water more polar
2006-08-22
lin yu
2006-08-22
Michael D Martin
2006-08-22
Rajib Ahmed
2006-08-23
Lin Yu
2006-08-23
Scott McWilliams
2006-08-24
乔大勇
COC wafer thinning
2006-08-24
matt estes
COC wafer thinning
matt estes
2006-08-24
Does anyone have any experience with thinning a COC wafer using only heat
and pressure.  I have been able to get a single wafer down to 280um
thickness using 185C and 4.5Kg for 20 minutes, but I seen to have hit a bit
of a lower bounds.


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