Hi Amron, I would try to use electrical pad heaters which can be stuck onto
the chamber outside and are very effective at heating up large areas. They
can be temp controlled also and run off the mains supply. You can buy then
in 10" or so strips or smaller pads and use several of them, but you cannot
cut them as they have integral wires. Tyco make then and they are called
"Silicone pad heaters"

Ian Burnett
IDB Technologies Ltd
29 Church Road
Winscombe
North Somerset
BS25 1BJ
United Kingdom

----- Original Message -----
From: "amron gary" 
To: "General MEMS discussion" 
Sent: Wednesday, August 23, 2006 11:59 PM
Subject: [mems-talk] Gas mixing chamber

> Hello:
>
> I have a 10"x1" gas mixing chamber. My diffusion gases
> are N2 and C2H2. Currently, gas mixing chamber is at
> ambient. I want to keep the temperature of my gas
> mixing chamber around 100 deg C in order to have
> better diffusion of gases before they go to the PVD
> chamber. Are there any heaters or heating techniques
> that I can use outside my PVD to keep this gas mixing
> chamber hotter than ambient?