Hi
J.J wang wrote:
> Thank you all for your generous helps.
>
> After the expose, PEB and developing, should I do some further bake ? Since I
the SU-8 100 to stay as the mechanical structure and it needs to have some
robustness.
[..]
You can hard bake it at 150-200 degrees celsius
but use a temperature ramp or steps.
You might also want to have a look into the data sheet
of your SU-8 supplier, e.g. Microchem has them here
(on the right side):
http://www.microchem.com/products/su_eight.htm
cu
Michi
--
Michael Riss
Parc Científic de B., Lab. Nanobio
Universitat Politècnica de Catalunya
C/ Josep Samitier 1-5
08028 Barcelona, Spain
EMail: [email protected]
Tel. +34 93 40 37 185
Fax. +34 93 40 37 181
