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MEMSnet Home: MEMS-Talk: Regarding Glass lithography
Regarding Glass lithography
2006-08-29
Kannan Ramaraj
2006-08-29
Gareth Jenkins
2006-08-30
Marc Häfner
Re: AW: [mems-talk] Regarding Glass lithography
2006-08-30
sokwon Paik
2006-09-01
walter essinger
2006-09-01
Xiaoguang "Leo" Liu
2006-09-03
walter essinger
2006-08-29
Bill Moffat
2006-08-30
Gareth Jenkins
2006-08-31
Kirt Williams
Regarding Glass lithography
Kannan Ramaraj
2006-08-29
Hi all!
    I am trying to make one-dimensional groove pattern over the glass surface
with a width and depth ranging from 50micron to 200 micron. I laminated dry
photoresist over the glass surface and prepared the pattern in the glass
surface. Photoresist is not staying more than 1 minute if i put it in dilute HF.
And also I read in this site that I can use Chromium as a sacrificial layer. But
I don't have chromium with me. Can you suggest some other material as a
sacrificial layer ? Whether I have to coat my sacrificial layer before or after
the photoresist ? Please give some idea to overcome this issue.
          Thanks!
                                  With regards,
                                    R.Kannan
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