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MEMSnet Home: MEMS-Talk: Plasma chamber
Plasma chamber
2006-08-29
amron gary
2006-08-29
Scott McWilliams
2006-08-29
David Henriks
2006-08-29
Bill Moffat
Evaporation of Silica
2006-08-30
Sreemanth M Uppuluri
2006-08-30
shay kaplan
hardbaked photoresist...
2006-08-30
Jan Michael Kubr
2006-08-30
Jack Mulligan
2006-08-30
Bill Flounders
2006-08-31
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Plasma chamber
amron gary
2006-08-29
Hello all,

I want build a chamber for Fluorine gas plasma. My
questions are:

1. Does someone has plasma chamber for Fluorine gas?
2. Can someone on this forum help me in building this
chamber?
3. What gases can be used to create the plasma of
flurorine? C2F2 or C2F4 or C2F6??? Thanks in advance..

Gary amron
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