Most chambers can handle fluorine gas, with the exception of a glass or
quartz chamber.  In my experience common gasses are CF4 and SF6.  The S
in Sf6 can create problems as with O2 from air and H2O from moist air
you get H2SO3 sulphurous acid.  The questions that you need to clarify
are what shape are you etching?  What uniformity do you need?  Do you
care if the walls of your plasma chamber are eaten at a rate that will
destroy the chamber in years.

Bill Moffat, CEO
Yield Engineering Systems, Inc.
2185 Oakland Rd., San Jose, CA  95131
(408) 954-8353


-----Original Message-----
From: [email protected]
[mailto:[email protected]] On Behalf Of amron gary
Sent: Tuesday, August 29, 2006 6:15 AM
To: General MEMS discussion
Subject: [mems-talk] Plasma chamber

Hello all,

I want build a chamber for Fluorine gas plasma. My questions are:

1. Does someone has plasma chamber for Fluorine gas?
2. Can someone on this forum help me in building this chamber?
3. What gases can be used to create the plasma of flurorine? C2F2 or
C2F4 or C2F6??? Thanks in advance..

Gary amron