A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Regarding Glass lithography
Regarding Glass lithography
2006-08-29
Kannan Ramaraj
2006-08-29
Gareth Jenkins
2006-08-30
Marc Häfner
Re: AW: [mems-talk] Regarding Glass lithography
2006-08-30
sokwon Paik
2006-09-01
walter essinger
2006-09-01
Xiaoguang "Leo" Liu
2006-09-03
walter essinger
2006-08-29
Bill Moffat
2006-08-30
Gareth Jenkins
2006-08-31
Kirt Williams
Regarding Glass lithography
Gareth Jenkins
2006-08-29
Chromium is used because it has good adhesion. Titanium is also a good
choice but perhaps most other metal coatings should last better than a
laminated resist(?). Maybe others can elaborate as I don't have much
experience here (in particular which metals withstand HF best and the
role of oxide layers).
If you can't coat Chromium, I guess you don't have the capability to
coat much else so I would suggest you could buy some pre-coated glass
wafers. You can buy glass coated with Chromium (plus a CrO layer) and
resist fairly cheaply.

Gareth

Kannan Ramaraj wrote:
> Hi all!
>     I am trying to make one-dimensional groove pattern over the glass surface
with a width and depth ranging from 50micron to 200 micron. I laminated dry
photoresist over the glass surface and prepared the pattern in the glass
surface. Photoresist is not staying more than 1 minute if i put it in dilute HF.
And also I read in this site that I can use Chromium as a sacrificial layer. But
I don't have chromium with me. Can you suggest some other material as a
sacrificial layer ? Whether I have to coat my sacrificial layer before or after
the photoresist ? Please give some idea to overcome this issue.
>           Thanks!
>

reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Tanner EDA by Mentor Graphics
University Wafer
Nano-Master, Inc.
Process Variations in Microsystems Manufacturing