Hi Gary, to answer your questions:

1.  I have a RIE plasma tool with SF6 gas and CF4.
2.  I have built simple parallel plate etchers before.  Can you be more
specific on your requirements
3.  All the listed gases are commonly used in plasma etching.  What is your
purpose for a "flourine" plasma?  Do you really need a carbon containing
flourine molecule? Are you etching, passivating, deposition, or studying the
plasma?

Regards,

Scott
----- Original Message -----
From: "amron gary" 
To: "General MEMS discussion" 
Sent: Tuesday, August 29, 2006 8:14 AM
Subject: [mems-talk] Plasma chamber


> Hello all,
>
> I want build a chamber for Fluorine gas plasma. My
> questions are:
>
> 1. Does someone has plasma chamber for Fluorine gas?
> 2. Can someone on this forum help me in building this
> chamber?
> 3. What gases can be used to create the plasma of
> flurorine? C2F2 or C2F4 or C2F6??? Thanks in advance..