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MEMSnet Home: MEMS-Talk: hardbaked photoresist...
Plasma chamber
2006-08-29
amron gary
2006-08-29
Scott McWilliams
2006-08-29
David Henriks
2006-08-29
Bill Moffat
Evaporation of Silica
2006-08-30
Sreemanth M Uppuluri
2006-08-30
shay kaplan
hardbaked photoresist...
2006-08-30
Jan Michael Kubr
2006-08-30
Jack Mulligan
2006-08-30
Bill Flounders
2006-08-31
[email protected]
hardbaked photoresist...
Jack Mulligan
2006-08-30
We have had success with vacuum cavitational streaming in removing some
stubborn resists.

Drop me an email at [email protected] if you want to discuss further or
see a paper on the subject.

Jack

-----Original Message-----
From: [email protected] [mailto:[email protected]]
On Behalf Of Jan Michael Kubr
Sent: Wednesday, August 30, 2006 10:44 AM
To: General MEMS discussion
Subject: [mems-talk] hardbaked photoresist...

I have a problem in that I cannot get hardbaked PR (SPR-220) of my
surfaces, both gold and Si.

With the gold sitting on TiW, piranha is not really a feasible solution.
I have tried long o2 plasma ashes and overnight baths in heated prs-3000
with little success.

Any other solutions I can try?
reply
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