We have had success with vacuum cavitational streaming in removing some
stubborn resists.

Drop me an email at [email protected] if you want to discuss further or
see a paper on the subject.

Jack

-----Original Message-----
From: [email protected] [mailto:[email protected]]
On Behalf Of Jan Michael Kubr
Sent: Wednesday, August 30, 2006 10:44 AM
To: General MEMS discussion
Subject: [mems-talk] hardbaked photoresist...

I have a problem in that I cannot get hardbaked PR (SPR-220) of my
surfaces, both gold and Si.

With the gold sitting on TiW, piranha is not really a feasible solution.
I have tried long o2 plasma ashes and overnight baths in heated prs-3000
with little success.

Any other solutions I can try?