Have you tried using a prime oven before coating (HMDS)



-----Original Message-----
From: [email protected]
To: [email protected]
Sent: Wed, 30 Aug 2006 10:44 AM
Subject: [mems-talk] hardbaked photoresist...


I have a problem in that I cannot get hardbaked PR (SPR-220) of my surfaces,
both gold and Si.

With the gold sitting on TiW, piranha is not really a feasible solution. I have
tried long o2 plasma ashes and overnight baths in heated prs-3000 with little
success.

Any other solutions I can try?