The way I protect the back side of a Si wafer I coat the backside with resist
and apply wax paper.


-----Original Message-----
From: [email protected]
To: [email protected]
Sent: Sun, 27 Aug 2006 12:46 AM
Subject: Re: [mems-talk] Unstable TMAH etching through wafer


Mike,

Thanks a lot for your prompt reply. Just one little question, how do you
protect back side of the Si wafer when you etch for long time? If I am not
wrong, from the etching set-up image, you etch the whole wafer, right?