Metal in DRIE contaminates the chamber and the sample surface. An optimized
AZ9260 should do the job. Another (might be better) option is use SPR220,
which has higher selectivity.

Good luck,

Hongjun

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Hongjun Zeng, PhD
MEMS/Nano Scientist
Nanotechnology Core Facility
(NCF formerly MAL)
University of Illinois at Chicago
3064 ERF Building
842 W. Taylor St., Chicago, IL 60607
Tel. 312-355-1259, Fax: 312-413-0447
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