Greetings,
Yes it is very tricky indeed.
We use glass as the substrate spin 70 micron PI
put a thin film of gold onto it than pattern,and release the structure/float
in water.
It works every.time
I cant tell you exactly how we do this just keep trying different methods
[email protected]
----- Original Message -----
From: 
To: 
Sent: Wednesday, September 06, 2006 6:12 AM
Subject: [mems-talk] floating a thin polymer layer off a substarte


> Dear all,
>
> I am wondering is there any expert who is familiar the so-called
> "floating" method to float a thin polymer layer (e.g. PMMA, PS, etc)
> onto water surface from a solid substrate (usually glass)?  It was
> mentioned many times in literature without any details.  Looks like
> "trivial" but I did not success.  In particular, I am wondering how
> larger the film can be floated off and how to do it correctly (like
> inclination angle)?