Hello,
We are attempting to build a circuit to measure differential capacitance of
~1fF for our MEMS sensors. However, our sensors are not yet ready, and we
want to calibrate our circuit on something with a known changing
capacitance. Does anyone know of something that we could purchase , such as
an accelerometer or micromirror, where the capacitance values are given? It
would be even better if the capacitance change responded to a voltage, so we
could test out our closed-loop feedback system.
Thanks,
Andrew O'Grady
Columbia University
Mechanical Engineering Dpet.
[email protected]