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MEMSnet Home: MEMS-Talk: Adhesive layer for gold on oxide and patterning
Adhesive layer for gold on oxide and patterning
2006-09-08
J.J HU
2006-09-08
walter essinger
2006-09-12
Kirt Williams
Adhesive layer for gold on oxide and patterning
J.J HU
2006-09-08
Hi all,
I am trying to put down 300~500nm Au film on Si dioxide as electrodes, and I
am just wondering what kind of adhesive layer (needs to be electrically
conductive) should I deposit before Au to improve the adhesion?

And anyone has some good thoughts about how to pattern the gold electrode
(as well as the adhensive layer)? Will regular lift-off work?

Thanks much,
JJ Hu


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