I've done a lot of work with SU-8 on glass.  In my experience, the
exposure dose and the post exposure bake time can cause the SU-8 film to
peel off. If you can reduce your post exposure bake time, you may be
able to solve this problem.   In my case, I've seen even 1-2 minute
difference in bake time result in the elimination of the peeling
problem.

Mike Pinelis
Ph.D. Candidate
University of Michigan

----Original Message-----
From: [email protected]
[mailto:[email protected]] On Behalf Of Bill Moffat
Sent: Monday, September 11, 2006 11:18 AM
To: General MEMS discussion
Subject: RE: [mems-talk] SU-8 adhesion problem

Try HMDS using vacuum dehydration before HMDS.