In general, SU-8's adhesion to glass tends to be pretty bad. You may
want to check up on a material called AP300 from Silicon Resources in
Chandler, AZ.

I did a comparison (nothing mathematical, just qualitative) with SU-8 on
Pyrex with and without AP300 - its pretty much night-and-day (I even got
pictures).

Best Regards,
Chad Brubaker

EV Group       invent * innovate * implement
Technology - Tel:  480.727.9635, Fax:  480.727.9700  e-mail:
[email protected], www.EVGroup.com

-----Original Message-----
From: [email protected]
[mailto:[email protected]] On Behalf Of Mike Pinelis
Sent: Monday, September 11, 2006 9:37 AM
To: 'General MEMS discussion'
Subject: RE: [mems-talk] SU-8 adhesion problem

I've done a lot of work with SU-8 on glass.  In my experience, the
exposure dose and the post exposure bake time can cause the SU-8 film to
peel off. If you can reduce your post exposure bake time, you may be
able to solve this problem.   In my case, I've seen even 1-2 minute
difference in bake time result in the elimination of the peeling
problem.