Take a look at "Etch Rates for Micromaching Processing, Part II" and pick a
metal that doesn't etch in HF and has good adhesion.
Chromium or niobium are two options.

    --Kirt Williams

----- Original Message -----
From: "Jeehwan Kim" 
To: 
Sent: Wednesday, September 06, 2006 11:39 AM
Subject: [mems-talk] HF resistance materials that have conductivity


> Dear all,
>
> I am fabricating micro-porous Si through anodization from the back side of
> wafer using HF-ethanol solution. The front surface becomes very rough
> after
> anodization. I need to protect this surface by depositing or spin coating
> something. The condition for protection layer is conductive and resistant
> to
> HF solution. Please let me know if you have any idea about these
> protection
> materials.