dear shankar,

reason is the sme as discussed earlier.

manish hooda
----- Original Message -----
From: "Shankar Dutta" 
To: 
Sent: Saturday, September 09, 2006 12:55 PM
Subject: [mems-talk] DRIE etching


> we are trying to do a DRIE etching (~15-20 micron deep) for comb like
structure. the masking layer is 0.3micron oxide layer. we patterned the
oxide layer by BOE etchant. after that we performed the DRIE experiment. but
surprisingly we find some scalopes in etched area, as if it does some
isotropic etching. is this problem related to paterning of oxide layer with
BOE.