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MEMSnet Home: MEMS-Talk: boron doped Silicon
boron doped Silicon
2006-09-13
sebastian wicklein
boron doped Silicon
sebastian wicklein
2006-09-13
Hello all,

Since I need boron doped silicon membrane with a thickness of 3-4 µm on a
silicon wafer and a boron concentration of 1020 atoms/cm3 over the whole
thickness I’m looking for someone who can help me with that matter.

Either a Supplier or someone who is able to deposit via CVD such a layer on
a Silicon wafer would be fine.

I would really appreciate every hint.



Thank you!



Regards,



Sebastian Wicklein




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