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MEMSnet Home: MEMS-Talk: How to deposit reliable amorphous C film?
Setting up a small plasma etch system
2006-09-14
Stuart Field
2006-09-14
[email protected]
How to deposit reliable amorphous C film?
2006-09-15
Darius
How to deposit reliable amorphous C film?
Darius
2006-09-15
Dear all,

I need an idea about deposition of smooth C film over the dielectric (say,
glass) substrate. We are trying to do the e-beam evaporation of graphite,
but can not get reliable adhesion (the result is a kind of smoked glass).

Can anyone advise about the conventional deposition technique for this?

Or give a clue about the adhesion improvement (substrate temperature, etc.)
during e-beam procedure?

Thanks

Darius

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