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MEMSnet Home: MEMS-Talk: Carbon Sputtering Versus Evaporation
SU-8 adhesion problem
2006-09-08
aeroalto
Carbon Sputtering Versus Evaporation
2006-09-15
Sreemanth M Uppuluri
2006-09-11
Bill Moffat
2006-09-11
Mike Pinelis
2006-09-11
Brubaker Chad
2006-09-11
Bill Moffat
Carbon Sputtering Versus Evaporation
Sreemanth M Uppuluri
2006-09-15
Hello,

I am trying to coat thin carbon films (thickness around 10 nm) that have
high sp3-content. I know that sputtered carbon has high sp3-content. I am
wondering if sp3 bonds are going to be available in thermally evaporated
carbon films. Please let me know if anyone has experience in this area.

Thanks,

Sreemanth
Purdue University


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