Dear Chan
These change from manufacturer to manufacturer. The base is usually silicon.
If there are bubble jet, silicon thru supply holes and  with etched bubble
chambers, reservoirs  and sputtered/ evaped / cvd heaters and conductors ,
then you have nozzle plates from different materials.  If you really are
into MEMS, take some time and each time you replace one, before throwing it
away, inspect it under a microscope, force off the nozzle layer and inspect
both parts. It's fascinating and changes from time to time.
Shay

-----Original Message-----
From: [email protected] [mailto:[email protected]]
On Behalf Of K A Chan
Sent: Tuesday, September 19, 2006 3:17 PM
To: General MEMS discussion
Subject: [mems-talk] Inkjet printer head fabrication

Dear all,
I would like to learn about inkjet printer head fabrication and technique.
Does anyone have any information such as materials used, processes, methods
etc..in this area?