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MEMSnet Home: MEMS-Talk: crucible material for evaporating Al
crucible material for evaporating Al
2006-09-20
luhao
2006-09-21
Bin Liu
2006-09-21
Shay Kaplan
Dry etch selectivity between Al and PMMA
2006-09-21
Xiaojing Zou
reducing stress in sputtered TiW
2006-09-21
Jan Michael Kubr
crucible material for evaporating Al
luhao
2006-09-20
Hi all,

What's the best material of crucible for evaporating Al?  I used graphite
crucible and always end up with broken crucible.

Thanks!
reply
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