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MEMSnet Home: MEMS-Talk: crucible material for evaporating Al
crucible material for evaporating Al
2006-09-20
luhao
2006-09-21
Bin Liu
2006-09-21
Shay Kaplan
Dry etch selectivity between Al and PMMA
2006-09-21
Xiaojing Zou
reducing stress in sputtered TiW
2006-09-21
Jan Michael Kubr
crucible material for evaporating Al
Bin Liu
2006-09-21
try copper?

luhao wrote:
> Hi all,
>
> What's the best material of crucible for evaporating Al?  I used
> graphite crucible and always end up with broken crucible.

Bin Liu
PhD Candidate
Electrical and Computer Engineer Department
Duke University
3583 FCIEMAS
Box 90291
Durham, NC 27708
Tel: (919)660-5567
Fax: (919)660-5293
Email:[email protected]

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