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MEMSnet Home: MEMS-Talk: Ohmic contact on Si
Ohmic contact on Si
2006-09-21
jpt sharma
2006-09-22
Borski, Justin
Ohmic contact on Si
jpt sharma
2006-09-21
Hi guys
  i am trying to make the ohmic contact on Si. I am thinking to deposit Al by
thermal evaporator. Do you guys have any idea if it works.
  Also I am wondering about the oxidation of Si. I want to deposit Al on si not
on Silicon oxide. Do you have any best idea to remove SiO2 (I used BOE). And How
long does it takes to oxidised again.
  Thanks and hope to hear from you.

  Jpt
reply
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