Try to keep the wafers for more time onto acetone. Use RR-4 if nothing
works.
Karthik
On 9/25/06, Rupesh Sawant wrote:
>
> hi,
> i tried to deposit Au on glass slide using eavpporation deposition method.
> i deposited a 5 nm chromiun layer before depositing Au and then deposited
> 180nm Au layer. photoresist was used as a sacrifial layer. the Au layer
> (along with the desired features) came out instantly when i dipped the
> slide
> in acetone but the photoresist was still there on the slide.
>
> could someone tell me a reson for this?
--
Regards,
Karthik Sriram Lakshmi Narasimhan,