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MEMSnet Home: MEMS-Talk: Simulation Program
Simulation Program
2006-09-25
Jordi Teva
2006-09-26
Roger Brennan
2006-09-28
Oguz Elibol
2006-09-28
Roger Brennan
Simulation Program
Jordi Teva
2006-09-25
Dear all,


I need a free simulator of oxidation, diffusion, ion implantation, etc.. and
other processes on Silicon.
I have heard about Supreme and Athena but I don't know if they are free.

Any help would be appreciated,


Jordi
reply
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