I saw a free download of Suprem on the Stanford U.
website.  It might take a computer geek to get it going.

PS: I found it using Google (hint! hint!)


Roger Brennan
Applications Director
Solecon Labs
770 Trademark Drive
Reno, NV 89521-5926
[email protected]
775-853-5900 ext 108


-----Original Message-----
From: [email protected]
[mailto:[email protected]]On Behalf Of Jordi Teva
Sent: Monday, September 25, 2006 2:52 PM
To: [email protected]
Subject: [mems-talk] Simulation Program


Dear all,


I need a free simulator of oxidation, diffusion, ion implantation, etc.. and
other processes on Silicon.
I have heard about Supreme and Athena but I don't know if they are free.