A
MEMS Clearinghouse
®
and information portal
for the MEMS and Nanotechnology community
Register
Sign-In
MEMSnet Home
About Us
What is MEMS?
Beginner's Guide
Discussion Groups
Advertise Here
News
MEMSnet Home
:
MEMS-Talk
:
Re: Problems with my Ti/Au wet etching process
Re: Problems with my Ti/Au wet etching process
2006-09-26
Vinay
2006-09-26
[email protected]
2006-09-27
Brad Cantos
2006-09-28
deepa sree
2006-09-27
Vinay
2006-09-27
Roger Shile
Re: Problems with my Ti/Au wet etching process
Vinay
2006-09-26
Hi Ali, One possible recipe to etch Ti is: 20H2O(DI) : 1HF : 1H2O2. Regards, vinay
reply
Events
Glossary
Materials
Links
MEMS-talk