Ali,
Your gold etch rate seems very slow.  We typically etch through several
thousand angstroms in 2-3 minutes.  Perhaps your etchant is old or too
dilute.  Transene makes a commercial gold etch.
Brad

On 9/25/06 11:54 AM, "[email protected]"  wrote:

Dear MEMS,

2) using KI/I2 etch for gold and then using the HF to etch Ti. The etch rate
on this one is very slow, 8A/min. and as a result, my photoresist can't hold
against the etch because it will take me at least 15min to etch through the
gold.