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MEMSnet Home: MEMS-Talk: low temperature metal to metal/semicond ohmic contact
low temperature metal to metal/semicond ohmic contact
2006-09-27
Florian Herrault
low temperature metal to metal/semicond ohmic contact
Florian Herrault
2006-09-27
Hi,

I woud like to make a ohmic contact at low temperature (200C). Does anyone have
read any papers or books that could help me ?
One application is on silicon and the second application is for copper to
copper bonding.

Thank you,

Florian
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