Hi Abhishek jain,
you have all kind of recipe description concerning AZ photoresit family in
this following link:
www.microchemicals.com/lithography/photoresist_0002.html

Hope that will help you.

Abdou.


>From: "Abhishek Jain" 
>Reply-To: General MEMS discussion 
>To: "General MEMS discussion" 
>Subject: [mems-talk] photoresist multiple coating
>Date: Wed, 27 Sep 2006 22:20:11 -0700
>
>Hi
>I want to do multiple coatings(2-3) of resist AZ4620 or a similar
>positive resist (not SU-8) to get thicknesses of 50-75um. I am looking
>for a recipe to do this. Please advice if you have any experience.
>
>Thanks
>-Abhishek Jain