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MEMSnet Home: MEMS-Talk: Simulation Program
Simulation Program
2006-09-25
Jordi Teva
2006-09-26
Roger Brennan
2006-09-28
Oguz Elibol
CAD tool for MEMS
2006-10-28
[email protected]
2006-09-28
Roger Brennan
Simulation Program
Oguz Elibol
2006-09-28
For any simulation work on micro/nano stuff check out www.nanohub.org, it
has T-suprem and many other tools, you can run tools online so you don't
have to download it and it is completely free...

Oguz


On 9/25/06, Jordi Teva  wrote:
>
> Dear all,
>
>
> I need a free simulator of oxidation, diffusion, ion implantation, etc..
> and
> other processes on Silicon.
> I have heard about Supreme and Athena but I don't know if they are free.
>
> Any help would be appreciated,
>
reply
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