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MEMSnet Home: MEMS-Talk: Photoresist with smooth and high resolution sidewall
Photoresist with smooth and high resolution sidewall
2006-09-29
Hsiu-Jen Wang
2006-09-29
Roger Shile
2006-09-29
Hsiu-Jen Wang
2006-09-30
Isaac Chan
2006-10-02
Hsiu-Jen Wang
2006-10-03
Isaac Chan
2006-09-29
Bill Moffat
2006-09-29
Hsiu-Jen Wang
2006-10-03
Bill Moffat
Photoresist with smooth and high resolution sidewall
Hsiu-Jen Wang
2006-09-29
Hi all,

    I'd like to obtain the information about which type of photoresist
has smooth and high resolution sidewall, whose thickness is 3um~5um.
Could anybody share his/her expeience? Appreciate a lot.

Alton Wang
University of Washington
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