When you say high resolution are you looking for resist with vertical
side walls?

Bill Moffat, CEO
Yield Engineering Systems, Inc.
2185 Oakland Rd., San Jose, CA  95131
(408) 954-8353


-----Original Message-----
From: [email protected]
[mailto:[email protected]] On Behalf Of Hsiu-Jen Wang
Sent: Friday, September 29, 2006 1:33 AM
To: [email protected]
Subject: [mems-talk] Photoresist with smooth and high resolution
sidewall

Hi all,

    I'd like to obtain the information about which type of photoresist
has smooth and high resolution sidewall, whose thickness is 3um~5um.
Could anybody share his/her expeience? Appreciate a lot.