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MEMSnet Home: MEMS-Talk: Photoresist with smooth and high resolution sidewall
Photoresist with smooth and high resolution sidewall
2006-09-29
Hsiu-Jen Wang
2006-09-29
Roger Shile
2006-09-29
Hsiu-Jen Wang
2006-09-30
Isaac Chan
2006-10-02
Hsiu-Jen Wang
2006-10-03
Isaac Chan
2006-09-29
Bill Moffat
2006-09-29
Hsiu-Jen Wang
2006-10-03
Bill Moffat
Photoresist with smooth and high resolution sidewall
Hsiu-Jen Wang
2006-09-29
Hi,

   "high resolution sidewall" means the roughness of the surface of
the sidewall is in sub-micron, even down-scale to sub-100nm.

Alton Wang
University of Washington


On 9/29/06, Roger Shile  wrote:
> Pray tell what is a "high resolution sidewall"?
reply
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