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MEMSnet Home: MEMS-Talk: Photoresist with smooth and high resolution sidewall
Photoresist with smooth and high resolution sidewall
2006-09-29
Hsiu-Jen Wang
2006-09-29
Roger Shile
2006-09-29
Hsiu-Jen Wang
2006-09-30
Isaac Chan
2006-10-02
Hsiu-Jen Wang
2006-10-03
Isaac Chan
2006-09-29
Bill Moffat
2006-09-29
Hsiu-Jen Wang
2006-10-03
Bill Moffat
Photoresist with smooth and high resolution sidewall
Bill Moffat
2006-10-03
In case you do not get a suitable resist.  Contact me for information on
image reversal.  Any positive resist, side walls controllable from-22
degrees through vertical to +22 degrees.  I have worked with up to 40
micron thick resist.
Bill Moffat, CEO
Yield Engineering Systems, Inc.
2185 Oakland Rd., San Jose, CA  95131
(408) 954-8353


-----Original Message-----
From: [email protected]
[mailto:[email protected]] On Behalf Of Hsiu-Jen Wang
Sent: Friday, September 29, 2006 1:33 AM
To: [email protected]
Subject: [mems-talk] Photoresist with smooth and high resolution
sidewall

Hi all,

    I'd like to obtain the information about which type of photoresist
has smooth and high resolution sidewall, whose thickness is 3um~5um.
Could anybody share his/her expeience? Appreciate a lot.

Alton Wang
University of Washington
reply
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