Hi,everyone,

I am working on a MEMS structure and I need to pattern PDMS. the PDMS was spin
onto the wafer, the thickness is around 30 microns. I have read some papers on
PDMS pattern, but they were all made by soft lithography(use mound), this method
is difficult to form PDMS film structure.

any suggestions are welcome!

PS. Is there a kind of UV-curable PDMS available?

Thanks a lot,

Jianhua

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Jianhua Tong
Advanced Micro&nanosystems Lab.
University of Toronto
[email protected]