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News	MEMSnet Home: MEMS-Talk: How to Get a mirror-like surface of silicon(100) using KOH wet silicon etch. How to Get a mirror-like surface of silicon(100) using KOH wet silicon etch. 2006-10-05 XiongHeng How to Get a mirror-like surface of silicon(100) using KOH wet silicon etch. 2006-10-05 Tao How to Get a mirror-like surface of silicon(100)using KOH wet silicon etch. 2006-10-05 Wilson, Thomas How to Get a mirror-like surface of silicon(100) using KOH wet silicon etch. 2006-10-06 LSujatha How to Get a mirror-like surface of silicon(100) using KOH wet silicon etch. XiongHeng 2006-10-05 Dear MEMS experts, I have a need to have a mirror-like surface of silicon(100) using KOH wet silicon etch. When I used conventional KOH etching,the solutions that I experiment was "40% sol. at 80 deg" and "30% sol. at 80 deg".But the roughness of the etched surface(100) is bad,Can't achieving our demand. I want to look for a solution which can achieve mirror-like suface using KOH etching. please Help me! Thank you very much! [email protected] 2006-10-5 reply
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