MEMS-talk

News	MEMSnet Home: MEMS-Talk: How to Get a mirror-like surface of silicon(100)using KOH wet silicon etch. How to Get a mirror-like surface of silicon(100) using KOH wet silicon etch. 2006-10-05 XiongHeng How to Get a mirror-like surface of silicon(100) using KOH wet silicon etch. 2006-10-05 Tao How to Get a mirror-like surface of silicon(100)using KOH wet silicon etch. 2006-10-05 Wilson, Thomas How to Get a mirror-like surface of silicon(100) using KOH wet silicon etch. 2006-10-06 LSujatha How to Get a mirror-like surface of silicon(100)using KOH wet silicon etch. Wilson, Thomas 2006-10-05 Try a Syton polish - this results in a specular-reflection quality surface. Details given in Appendix B of "Phonon reflection in silicon" by Jane B. Throwe, Ph.D. thesis, Physics, Indiana University 1986. TE Wilson Marshall reply
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