A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: How to Get a mirror-like surface of silicon(100)using KOH wet silicon etch.
How to Get a mirror-like surface of silicon(100) using KOH wet silicon etch.
2006-10-05
XiongHeng
How to Get a mirror-like surface of silicon(100) using KOH wet silicon etch.
2006-10-05
Tao
How to Get a mirror-like surface of silicon(100)using KOH wet silicon etch.
2006-10-05
Wilson, Thomas
How to Get a mirror-like surface of silicon(100) using KOH wet silicon etch.
2006-10-06
LSujatha
How to Get a mirror-like surface of silicon(100)using KOH wet silicon etch.
Wilson, Thomas
2006-10-05
Try a Syton polish - this results in a specular-reflection quality
surface. Details given in Appendix B of "Phonon reflection in silicon"
by Jane B. Throwe, Ph.D. thesis, Physics, Indiana University 1986.

TE Wilson
Marshall
reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
The Branford Group
Harrick Plasma, Inc.
Nano-Master, Inc.
MEMStaff Inc.