---- Original message ----
>Date: Tue, 10 Oct 2006 17:15:04 -0400
>From: Bo Bob Huo 
>Subject: [mems-talk] photoresist peeled off together with PDMS
>To: [email protected]
>
>Dear all,
>
>When I peeled off the PDMS, the photoresis was always peeled off
>together. The procedure is listed as follow. Please give me some
>suggestions about which step might cause this problem.
>

Hi Bob,
In my opinion, the quality of no stick (tridecafluoro 1,1,2,2
tetrahydrooctyl)-1-trichlorosilane) is critical in this situation. No stick is
sensitive to humidity. Everytime you open a bottle, you should blow the bottle
with N2, seal with parafilm and keep in desiccator.  I think you should try a
fresh bottle of no stick.
I heard that time for coating no stick is the longer the better. In my group,
people keep no stick and substrate in vacuum for 2hr. You should turn off pump
after a while because silane vapar can be sucked off by pumping.
Another way you can try is to drop one drop of no stick near the substrate in a
petri dish and let silane do the work for 30min.

Good luck!
Huaibin Zhang

Chemistry Department
University of Illinois
Office: MRL 3011
104 S. Goodwin Avenue,
Urbana, IL 61801
Tel: (home)217-344-5282
Tel: (office)217-265-5068
email: [email protected]