I'm curious what this "no stick" is for. (The original question was a bit
unclear - why is the guy trying to peel PDMS from "photoresis"?) A Google
for "no stick" returns "Crisco No-Stick Cooking Sprays" I'm sure this isn't
what you're referring to:)
-----Original Message-----
>Dear all,
>
>When I peeled off the PDMS, the photoresis was always peeled off
>together. The procedure is listed as follow. Please give me some
>suggestions about which step might cause this problem.
>
Hi Bob,
In my opinion, the quality of no stick (tridecafluoro 1,1,2,2
tetrahydrooctyl)-1-trichlorosilane) is critical in this situation. No stick
is sensitive to humidity. Everytime you open a bottle, you should blow the
bottle with N2, seal with parafilm and keep in desiccator. I think you
should try a fresh bottle of no stick.
I heard that time for coating no stick is the longer the better. In my
group, people keep no stick and substrate in vacuum for 2hr. You should turn
off pump after a while because silane vapar can be sucked off by pumping.
Another way you can try is to drop one drop of no stick near the substrate
in a petri dish and let silane do the work for 30min.
Good luck!
Huaibin Zhang