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MEMSnet Home: MEMS-Talk: photoresist peeled off together with PDMS
photoresist peeled off together with PDMS
2006-10-11
Huaibin Zhang
photoresist peeled off together with PDMS
2006-10-11
Roger Shile
2006-10-11
Huaibin Zhang
2006-10-13
Huaibin Zhang
photoresist peeled off together with PDMS
Huaibin Zhang
2006-10-11
--- Original message ----
>Date: Wed, 11 Oct 2006 10:14:43 -0700
>From: "Roger Shile" 
>Subject: RE: [mems-talk] photoresist peeled off together with PDMS
>To: "'General MEMS discussion'" 
>
>I'm curious what this "no stick" is for.  (The original question was a bit
>unclear - why is the guy trying to peel PDMS from "photoresis"?)  A Google
>for "no stick" returns "Crisco No-Stick Cooking Sprays" I'm sure this isn't
>what you're referring to:)
>
>-----Original Message-----

Hi Roger,
"No stick" is a nickname for tridecafluoro 1,1,2,2
tetrahydrooctyl)-1-trichlorosilane. It is a pretty standard coating to decrease
surface energy and it works as Teflon. The field we are talking about is soft
lithography. PDMS is molded on a photoresist master to form duplicated pattern.
Huaibin
Huaibin Zhang

Chemistry Department
University of Illinois
Office: MRL 3011
104 S. Goodwin Avenue,
Urbana, IL 61801
Tel: (home)217-344-5282
Tel: (office)217-265-5068
email: [email protected]
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